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Nima Ghalichechian

  • Assistant Professor, Electrical & Computer Engr.
  • Room #245
    1330 Kinnear Rd
    Columbus, OH 43212
  • 614-292-6895

About

Dr. Nima Ghalichechian is an Assistant Professor at the Department of Electrical and Computer Engineering and the ElectroScience Laboratory. He received his Ph.D. in Electrical Engineering in 2007 from University of Maryland, College Park where he developed electrostatic micromotors supported on microball bearings. From 2007 to 2012 he was with the Research Department of FormFactor Inc., Livermore, California as a Senior Principal Engineer. During this period, he helped to design and develop microsprings for advanced probe cards used in testing memory and SoC semiconductor devices. Dr. Ghalichechian joined The Ohio State University (OSU) as a Research Scientist in 2012. As a principal investigator, he has helped establishing several new programs at OSU sponsored by NSF, DARPA, and AFRL. From 2016-2017, he held a Research Assistant Professor position at ECE. His research interests are in the area of RF microsystems. He is currently principal investigator of the RF Microsystems Laboratory located at room 210 of the ElectroScience Laboratory.



Areas of Interest
Dr. Ghalichechian’s research interests include
  • Reconfigurable antennas and RF systems
  • Millimeter-wave and terahertz microsystems
  • Micro-electro-mechanical systems (MEMS)
  • Novel materials and micro fabrication processes

Honors

  • 20160301

    Best student paper award at the International Workshop on Antenna Technology (iWAT), Hilton Cocoa Beach, FL, Feb 29- Mar 2, 2016 (Student name: Dimitris Papantonis)..

  • 20160101

    Best student paper competition award (2nd place) at the USNC/URSI National Radio Science Meeting, Boulder, Colorado, Jan 6, 2016., Student name: Ersin Yetisir, co-advisor.

  • 20141001

    Senior Member.

  • 20071201

    George Harhalakis Outstanding Systems Engineering Graduate Student Award.

  • 20071201

    Best Speaker Award.

  • 20061201

    Graduate Research Award.

  • 20041101

    Best Paper Award.

Journal Articles

2016

  • V. Sanphuang; N. Ghalichechian; N. K. Nahar; J. L. Volakis, 2016, "Reconfigurable THz Filters Using Phase-Change Material and Integrated Heater,." IEEE Transactions on Terahertz Science and Technology 6, no. 4, 583-591 - 583-591.
  • E. Yetisir, N. Ghalichechian, J. Volakis, 2016, "Ultra-wideband Array with 70° Scanning using FSS Superstrate." IEEE Transaction on Antennas and Propagation NA, no. 99, NA - NA.
  • Sanphuang, V.; Ghalichechian, N.; Nahar, N.K.; Volakis, J.L., 2016, "Reconfigurable THz Filters Using Phase-Change Material and Integrated Heater." IEEE Transactions on Terahertz Science and Technology 6, no. 4, 583-591 - 583-591.

2015

  • Ghalichechian, N.; Sertel, K., 2015, "Permittivity and loss characterization of SU-8 films for mmW and terahertz applications." IEEE Antennas and Wireless Propagation Letters 14, 723-726 - 723-726.
  • Ghalichechian,Nima; Sertel,Kubilay, 2015, "Permittivity and Loss Characterization of SU-8 Films for mmW and Terahertz Applications." IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS 14, 723-726 - 723-726.

2009

  • Beyaz, M.I.; McCarthy, M.; Ghalichechian, N.; Ghodssi, R., 2009, "Closed-loop control of a long-range micropositioner using integrated photodiode sensors." Sensors and Actuators, A: Physical 151, no. 2, 187-194 - 187-194.

2008

  • Beyaz,M,I; Ghalichechian,N; Ghodssi,R, 2008, "Toward an autonomous electrostatic micromotor: Integrated feedback control." MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST 483-486 - 483-486.
  • Ghalichechian,Nima; Modafe,Afireza; Beyaz,Mustafa,Ilker; Ghodssi,Reza, 2008, "Design, fabrication, and characterization of a rotary micromotor supported on microball bearings." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 17, no. 3, 632-642 - 632-642.

2007

  • Ghalichechian, N.; Modafe, A.; Lang, J.H.; Ghodssi, R., 2007, "Dynamic characterization of a linear electrostatic micromotor supported on microball bearings." Sensors and Actuators, A: Physical 136, no. 2, 496-503 - 496-503.
  • Ghalichechian,N; Modafe,A; Beyaz,M,I; Ghodssi,R, 2007, "A rotary micromotor supported on microball bearings." TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2

2006

  • Modafe,A; Ghalichechian,N; Frey,A; Lang,J,H; Ghodssi,R, 2006, "Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion." JOURNAL OF MICROMECHANICS AND MICROENGINEERING 16, no. 9, S182-S190 - S182-S190.

2005

  • Modafe,A; Ghalichechian,N; Frey,A; Lang,J,H; Ghodssi,R, 2005, "A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers." TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 693-696 - 693-696.
  • Modafe, A.; Ghalichechian, N.; Powers, M.; Khbeis, M. et al., 2005, "Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS." Microelectronic Engineering 82, no. 2, 154-167 - 154-167.

2004

  • Ghalichechian, N.; Modafe, A.; Ghodssi, R.; Lazzeri, P. et al., 2004, "Integration of benzocyclobutene polymers and silicon micromachined structures using anisotropic wet etching." Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22, no. 5, 2439-2447 - 2439-2447.
  • Modafe, A.; Ghalichechian, N.; Kleber, B.; Ghodssi, R., 2004, "Electrical characterization of benzocyclobutene polymers for electric micromachines." IEEE Transactions on Device and Materials Reliability 4, no. 3, 495-508 - 495-508.

Presentations

  • "Reconfigurable Electromagnetic Interface." 2015, Presented at DARPA ACT Annual PI Review Meeting,
  • "Reconfigurable RF Microsystems Research Overview." 2015, Presented at Consortium on Electromagnetics and Radio Frequencies 5th Technical Meeting,
  • "Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings." Presented at Massachusetts Institute of Technology,
  • "Towards Reconfigurable and Low-loss Millimeter-Wave Antennas using MEMS Paraffin Micro-actuators." 2014, Presented at Consortium on Electromagnetics and Radio Frequencies 5th Technical Meeting,
  • "Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings,." 2010, Presented at Stanford University MEMS and NEMS Seminar Series,
  • "MEMS FOR RECONFIGURABLE RF MICROSYSTEMS, MICROMOTORS, AND MICROROSPRINGS." 2014, Presented at National Nanotechnology Research Center, Bilkent University,

Papers in Proceedings

2017

  • Ghassemiparvin, B.; Shah, S.; Ghalichechian, N. "Novel paraffin-based 100-GHz variable capacitors for reconfigurable antennas." (5 2017).
  • Ghassemiparvin, B.; Shah, S.; Ghalichechian, N.; IEEE, "Novel Paraffin-based 100-GHz Variable Capacitors for Reconfigurable Antennas." (1 2017).
  • Keshtkaran, K.; Ghalichechian, N.; IEEE, "60 GHz Capacitively Probe-Fed Patch Arrays with Suspended Elements." (1 2017).
  • Ghassemiparvin, B.; Shah, S.; Ghalichechian, N. "Novel Paraffin-based 100-GHz Variable Capacitors for Reconfigurable Antennas." in 11th European Conference on Antennas and Propagation (EUCAP). (1 2017).
  • Keshtkaran, K.; Ghalichechian, N. "60 GHz capacitively probe-fed patch arrays with suspended elements." (5 2017).
  • Keshtkaran, K.; Ghalichechian, N. "60 GHz Capacitively Probe-Fed Patch Arrays with Suspended Elements." in 11th European Conference on Antennas and Propagation (EUCAP). (1 2017).

2016

  • Ghassemiparvin, B.; Ghalichechian, N.; IEEE, "Permittivity and Dielectric Loss Measurement of Paraffin Films for mmW and THz Applications." (1 2016).
  • Keshtkaran, K.; Ghalichechian, N. "Suspended 60 GHz Phased Array Antenna With High Efficiency." in IEEE International Workshop on Antenna Technology (iWAT). (1 2016).
  • Benjamin Lough, Behnam Ghassemiparvin, Nima Ghalichechian "RF Micro-Electro-Mechanical Pulmonary Artery Banding for Congenital Heart Diseases." in 38th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC). (8 2016).
  • Keshtkaran, K.; Ghalichechian, N.; IEEE, "Suspended 60 GHz Phased Array Antenna With High Efficiency." (1 2016).
  • Papantonis, D.K.; Yetisir, E.; Ghalichechian, N.; Volakis, J.L. "Tunable band rejection in a tightly-coupled array using varactor diodes." (3 2016).
  • D. K. Papantonis, N. Ghalichechian and J. L. Volakis "Tunable Band Rejection In A Tightly-Coupled Array Using Varactor Diodes." in International Workshop on Antenna Technology (iWAT). (2 2016).
  • Papantonis, D.K.; Yetisir, E.; Ghalichechian, N.; Volakis, J.L. "Tunable Band Rejection In A Tightly-Coupled Array Using Varactor Diodes." in IEEE International Workshop on Antenna Technology (iWAT). (1 2016).
  • Ghassemiparvin, B.; Ghalichechian, N. "Reconfigurable millimeter-wave antennas using paraffin phase change materials." (5 2016).
  • Papantonis, D.K.; Yetisir, E.; Ghalichechian, N.; Volakis, J.L. et al. "Tunable Band Rejection In A Tightly-Coupled Array Using Varactor Diodes." (1 2016).
  • Ghassemiparvin, B.; Ghalichechian, N. "Permittivity and Dielectric Loss Measurement of Paraffin Films for mmW and THz Applications." in IEEE International Workshop on Antenna Technology (iWAT). (1 2016).
  • Keshtkaran, K.; Ghalichechian, N. "Suspended 60 GHz phased array antenna with high efficiency." (3 2016).
  • V. Sanphuang, N. Ghalichechian, N. Nahar, J. L. Volakis "Reconfigurable THz Array Employing Vanadium Dioxide." in URSI National Radio Science Meeting Boulder. (1 2016).
  • K. Keshtkaran and N. Ghalichechian "Suspended 60 GHz Phased Array Antenna With High Efficiency." in International Workshop on Antenna Technology (iWAT). (2 2016).
  • B. Ghassemiparvin and N. Ghalichechian "Permittivity and Dielectric Loss Measurement of Paraffin for mW and THz Applications." in International Workshop on Antenna Technology (iWAT), Cocoa Beach. (2 2016).
  • Ghassemiparvin, B.; Ghalichechian, N. "Permittivity and dielectric loss measurement of paraffin films for mmW and THz applications." (3 2016).
  • B. Ghassemiparvin and N. Ghalichechian, "Reconfigurable Millimeter-wave Antennas using Paraffin-Based MEMS Capacitors." in European Conference on Antennas and Propagation (EuCAP), Davos. (4 2016).
  • Ghassemiparvin, B.; Ghalichechian, N.; IEEE, "Reconfigurable Millimeter-Wave Antennas Using Paraffin Phase Change Materials." (1 2016).
  • Ghassemiparvin, B.; Ghalichechian, N. "Reconfigurable Millimeter-Wave Antennas Using Paraffin Phase Change Materials." in 10th European Conference on Antennas and Propagation (EuCAP). (1 2016).
  • E. Yetisir, N. Ghalichechian and J. L. Volakis "A Novel Array with 6:1 Bandwidth and 70° Scanning Using FSS Superstrate." in URSI National Radio Science Meeting, Boulder. (1 2016).

2015

  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L.; IEEE, "UWB Arrays With Tunable Band Rejection." (1 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L.; IEEE, "Reconfigurable Ultra-wideband Array with Tunable Band Rejection across a 7:1 Bandwidth." (1 2015).
  • Papantonis, D.K.; Novak, M.; Ghalichechian, N.; Volakis, J.L. et al. "Low-Profile Ultra-Wideband Reconfigurable Tightly-Coupled Arrays." (1 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L. "Reconfigurable ultra-wideband array with tunable band rejection across a 7:1 Bandwidth." (1 2015).
  • Chau, L.; Ho, J.G.; Lan, X.; Altvater, G. et al. "Optically-controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." (1 2015).
  • Papantonis, D.K.; Novak, M.; Ghalichechian, N.; Volakis, J.L. "Low-profile ultra-wideband reconfigurable tightly-coupled arrays." (8 2015).
  • Chau, L.; Ho, J.G.; Lan, X.; Altvater, G. et al. "Optically controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." (1 2015).
  • Chau, L.; Ho, J.G.; Lan, X.; Altvater, G. et al. "Optically-controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." in Conference on Open Architecture/Open Business Model Net-Centric Systems and Defense Transformation. (1 2015).
  • Yetisir, E.; Ghalichechian, N.; Volakis, J.L. "Wideband & Wide Angle Scanning Array with Parasitic Superstrate." in IEEE International Symposium on Antennas and Propagation / USNC/URSI National North American Radio Science Meeting. (1 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L. "Reconfigurable Ultra-wideband Array with Tunable Band Rejection across a 7:1 Bandwidth." in IEEE MTT-S International Microwave Symposium (IMS). (1 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L. "UWB Arrays With Tunable Band Rejection." in IEEE International Symposium on Antennas and Propagation / USNC/URSI National North American Radio Science Meeting. (1 2015).
  • Yetisir, E.; Ghalichechian, N.; Volakis, J.L.; IEEE, "Wideband & Wide Angle Scanning Array with Parasitic Superstrate." (1 2015).
  • Papantonis, D.K.; Novak, M.; Ghalichechian, N.; Volakis, J.L. "Low-Profile Ultra-Wideband Reconfigurable Tightly-Coupled Arrays." in 9th European Conference on Antennas and Propagation EuCAP. (1 2015).
  • Yetisir, E.; Ghalichechian, N.; Volakis, J.L. "Wideband & wide angle scanning array with parasitic superstrate." (10 2015).
  • S. Sahin, N. Ghalichechian, N. Nahar, K. Sertel "Lithographically-fabricated Ultrawideband Phased-Arrays for Agile mmW Connectivity." (7 2015).
  • E. Alwan, N. Ghalichechian, J. Volakis "Low Power Millimeter Wave Beamforming Transceiver System using On-Site Coding." (7 2015).
  • D. Papantonis, N. Ghalichechian, J. Volakis "Reconfigurable Ultra-Wideband Array with Tunable Band Rejection across a 7:1 Bandwidth." in Reconfigurable Ultra-Wideband Array with Tunable Band Rejection across a 7:1 Bandwidth. (5 2015).
  • Chau, L., Ho, J. G., Lan, X., Altvater, G., Young, R. M., El-Hinnawy, N., Nichols, D., Volakis, J., Ghalichechian, N. "Optically controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." in Proceedings of SPIE - The International Society for Optical Engineering. (1 2015).
  • J. L. Volakis, E. A. Alwan, D. Papantonis, M. Novak, N. Ghalichechian and W. Khalil "Low Power Ultra-Wideband Digital Beamforming for UHF to Millimeter-Wave Applications." (3 2015).
  • D. Papantonis, M. Novak, N. Ghalichechian, John L. Volakis "Conformal and Reconfigurable Ultra-wide-band Arrays." (4 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L. "UWB arrays with tunable band rejection." (10 2015).
  • Loc Chau, James G. Ho, Xing Lan, Norma Riley, Robert M. Young, Nabil El-Hinnawy, Doyle Nichols, John Volakis, and Nima Ghalichechian "Optically-controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." (3 2015).
  • Yetisir, E., Ghalichechian, N., Volakis, J. L. "Wideband & wide angle scanning array with parasitic superstrate." in IEEE Antennas and Propagation Society, AP-S International Symposium (Digest). (1 2015).
  • D. Papantonis, N. Ghalichechian, J. Volakis "UWB Arrays With Tunable Band Rejection." (5 2015).

2014

  • V. Sanphuang, N. Ghalichechian, N. Nahar, J. Volakis "Reconfigurable THz Filters with Integrated Micro-Heater." (7 2014).
  • V. Sanphuang, N. Ghalichechian, N. Nahar, J. Volakis "Phase Change Materials for Reconfigurability in THz band." (6 2014).

2008

  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R. "Toward an autonomous electrostatic micromotor: Integrated feedback control." (8 2008).
  • Ghalichechian, N.; McCarthy, M.; Beyaz, M.I.; Ghodssi, R. et al. "Measurement and modeling of friction in linear and rotary micromotors supported on microball bearings." (1 2008).
  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R.; IEEE, "Toward an autonomous electrostatic micromotor: Integrated feedback control." (1 2008).
  • Beyaz, M.I.; McCarthy, M.; Ghalichechian, N.; Ghodssi, R. "Photodiode position sensors for integrated feedback control of a long-range micropositioner." (12 2008).
  • Ghalichechian, N.; McCarthy, M.; Beyaz, M.I.; Ghodssi, R. "Measurement and modeling of friction in linear and rotary micromotors supported on microball bearings." (8 2008).
  • M.I. Beyaz, M. McCarthy, N. Ghalichechian, and R. Ghodssi "Photodiode Position Sensors for Integrated Feedback Control of a Long-Range Micropositioner." (10 2008).
  • N. Ghalichechian, M. McCarthy, M. I. Beyaz, and R. Ghodssi "Measurement and Modeling of Friction in Linear and Rotary Micromotors Supported on Microball Bearings." in IEEE International Conference on Micro Electro Mechanical Systems. (1 2008).
  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R. "Toward an autonomous electrostatic micromotor: Integrated feedback control." in 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008). (1 2008).
  • Ghalichechian, N.; McCarthy, M.; Beyaz, M.I.; Ghodssi, R. "Measurement and modeling of friction in linear and rotary micromotors supported on microball bearings." in 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008). (1 2008).

2007

  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R.; IEEE, "Toward smart micromachines with integrated feedback control." (1 2007).
  • M. I. Beyaz, N. Ghalichechian, A. Modafe, and R. Ghodssi "Towards Feedback Control with Integrated Position Sensing in Micromachines." in AVS 54th International Symposium, Seattle. (10 2007).
  • M. I. Beyaz, N. Ghalichechian, and R. Ghodssi "Towards an Autonomous Electrostatic Micromotor: Integrated Feedback Control." (12 2007).
  • Ghalichechian, N.; Modafe, A.; Beyaz, M.I.; Ghodssi, R. et al. "A rotary micromotor supported on microball bearings." (1 2007).
  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R. "Toward smart micromachines with integrated feedback control." (12 2007).
  • Ghalichechian, N.; Modafe, A.; Beyaz, M.I.; Ghodssi, R. "A rotary micromotor supported on microball bearings." in 14th International Conference on Solid-State Sensors, Actuators and Microsystems/21st European Conference on Solid-State Transducers. (1 2007).
  • Ghalichechian, N.; Modafe, A.; Beyaz, M.I.; Ghodssi, R. "A rotary micromotor supported on microball bearings." (12 2007).
  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R. "Toward smart micromachines with integrated feedback control." in International Semiconductor Device Research Symposium. (1 2007).
  • N. Ghalichechian, A. Modafe, M. I. Beyaz, and R. Ghodssi "A Rotary Micromotor Supported on Microball Bearings." (6 2007).

2006

  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion." (9 2006).
  • N. Ghalichechian, A. Modafe, A. Frey, J. H. Lang, and R. Ghodssi "Dynamic Characterization of a Linear Variable-Capacitance Micromotor." (6 2006).
  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion." in 5th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications. (9 2006).
  • N. Ghalichechian, A. Modafe, M. I. Beyaz, and R. Ghodssi "Chemical Mechanical Planarization of BCB Polymer Films: Effect of Cure Temperature." (11 2006).
  • N. Ghalichechian, A. Modafe, M. I. Beyaz, C. M. Waits, and R. Ghodssi "Design and Fabrication of a Rotary, Electrostatic Micromotor Supported on Microball Bearings." (12 2006).
  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion." (9 2006).

2005

  • A. Modafe, N. Ghalichechian, A. Frey, J. H. Lang, and R. Ghodssi "Microball-Bearing-Supported Electrostatic Micromachines with Polymer Dielectric Films for Electromechanical Power Conversion." (11 2005).
  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers." in 13th International Conference on Solid-State Sensors, Actuators and Microsystems. (1 2005).
  • Nima Ghalichechian, Alireza Modafe, Paolo Lazzeri, Victor Micheli, Mariano Anderle, and Reza Ghodssi "Characterization of Benzocyclobutene and Chromium-gold Film Interface for Application in Silicon Micromachining." (3 2005).
  • A. Modafe, N. Ghalichechian, J. H. Lang, and R. Ghodssi ""A Microball-Bearing-Supported Linear Electrostatic Micromotor with Benzocyclobutene Polymer Insulating Layers." (6 2005).
  • A. Modafe, N. Ghalichechian, and R. Ghodssi, "Embedded Benzocyclobutene Islands in Silicon (EBIS) Process for Fabrication of Electrostatic Microelectromechanical Devices." (3 2005).
  • A. Modafe, N. Ghalichechian, and R. Ghodssi, "Multilevel Interconnection and Isolation for Electrostatic MEMS Using Embedded Benzocyclobutene in Silicon Process." (10 2005).
  • Modafe, A.; Ghalichechian, N.; Ghodssi, R. "Multilevel interconnection and isolation for electrostatic MEMS using embedded benzocyclobutene in silicon process." (12 2005).
  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers." (1 2005).
  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers." (11 2005).

2004

  • Modafe, A.; Ghalichechian, N.; Kleber, B.; Ghodssi, R. "Electrical characterization of BCB for electrostatic microelectromechanical devices." (1 2004).
  • Tan, X.; Modafe, A.; Hergert, R.; Ghalichechian, N. et al. "Vision-based microtribological characterization of linear microball bearings." (12 2004).
  • X. Tan, A. Modafe, R. Hergert, N. Ghalichechian, B. Shapiro, and R. Ghodssi "Vision-based Microtribological Characterization of Linear Microball Bearings." (11 2004).
  • Modafe, A.; Ghalichechian, N.; Kleber, B.; Ghodssi, R. "Electrical characterization of BCB for electrostatic microelectromechanical devices." in Symposium on Micro- and Nanosystems held at the 2003 MRS Fall Meeting. (1 2004).
  • A. Modafe, N. Ghalichechian, and R. Ghodssi "BCB-Based Linear Micromotor Supported on Microball Bearings: Design Concepts, Characterization, and Fabrication Development." (11 2004).

2003

  • Modafe, A.; Ghalichechian, N.; Kleber, B.; Ghodssi, R. "Electrical characterization of BCB for electrostatic microelectromechanical devices." (12 2003).
  • A. Modafe, N. Ghalichechian, B. Kleber and R. Ghodssi "Electrical Characterization of BCB for Electrostatic Microelectromechanical Devices." (12 2003).
  • N. Ghalichechian, A. Modafe and R. Ghodssi "Integration of Silicon Anisotropic Wet Etching and BCB Processes." (11 2003).