Skip to main content

MEMS and Microsystems


teraview equipment with computer on top

Conventional micro-electro-mechanical systems (MEMS) and devices such as accelerometers, gyroscopes, pressure sensors, and micromirrors have become essential parts of modern-day smartphones, tablet computers, automobiles, and projectors. MEMS provides a unique capability in creating microsystems that, in most cases, can mechanically move, as well as provide tuning and other essential functionalities. 

Using MEMS, various devices can be designed and fabricated so that the transmission, absorption, or reflection of the incident wave (mm-Wave to Terahertz) is modified. These are small-scale, reconfigurable, low-loss, low-power, large-bandwidth microsystems that can be used in communication, sensing, and imaging applications. Furthermore, unconventional microfabrication techniques that MEMS thrive on, such as deep silicon etching, high aspect ratio structures, and thick films can be utilized to create ultra-wide-band and highly-efficient devices.

  Interdisciplinary topics in this research include:
  • MEMS-based reconfigurable systems such as reflectarrays
  • Integration of mm-Wave devices such as antennas on chip
  • Characterization of novel materials for terahertz applications
  • Fabrication of miniaturized mm-Wave waveguides and devices
  • Micromachined tunable metamaterials and frequency selective surfaces
  • Development of novel materials and microfabrication techniques for micro and nanodevices
monitors with wires and circuit boards