MEMS and Microsystems
Using MEMS, various devices can be designed and fabricated so that the transmission, absorption, or reflection of the incident wave (mm-Wave to Terahertz) is modified. These are small-scale, reconfigurable, low-loss, low-power, large-bandwidth microsystems that can be used in communication, sensing, and imaging applications. Furthermore, unconventional microfabrication techniques that MEMS thrive on, such as deep silicon etching, high aspect ratio structures, and thick films can be utilized to create ultra-wide-band and highly-efficient devices.
- MEMS-based reconfigurable systems such as reflectarrays
- Integration of mm-Wave devices such as antennas on chip
- Characterization of novel materials for terahertz applications
- Fabrication of miniaturized mm-Wave waveguides and devices
- Micromachined tunable metamaterials and frequency selective surfaces
- Development of novel materials and microfabrication techniques for micro and nanodevices